“silicon thermal oxidation technology”的概念、定义、翻译、参考文献-科学参考

单词	silicon thermal oxidation technology
释义	silicon thermal oxidation technology Encyclopedia 工学【半导体工艺技术】释 silicon thermal oxidation technology硅热氧化工艺硅（Si）与含有氧化物质的气体，如水汽和氧气在高温下发生化学反应，在硅片表面生成一层致密的二氧化硅（SiO2）薄膜的过程。
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