“silicon micro-mechanical accelerometer”的概念、定义、翻译、参考文献-科学参考

单词	silicon micro-mechanical accelerometer
释义	silicon micro-mechanical accelerometer Encyclopedia 工学硅微加速度计释 silicon micro-mechanical accelerometer硅微加速度计一种微电子技术和微机械加工技术相结合的惯性仪表。又称硅微机械加速度计。
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