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silicon carbide epitaxy
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silicon carbide epitaxy
Encyclopedia
工学
半导体外延生长
释
silicon carbide epitaxy
碳化硅外延
在碳化硅单晶衬底(基片)上生长有一定要求(厚度和掺杂浓度)、具有特定晶面的碳化硅单晶层的技术。
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