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silicon-based micro electro-mechanical system
释义
silicon-based micro electro-mechanical system
Encyclopedia
工学
微纳器件
释
silicon-based micro electro-mechanical system; silicon-based MEMS
硅基微机电系统
在硅、绝缘体上硅(silicon-on-insulator,SOI)等基底材料的基础上,应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
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full automatic extensometer
full-automatic land gravimeter
full backup
full battery
full bearing product period
full binary tree
Full Biographies of Heroes
full calculus
full cardigan stitch
full casing drill rig
Full Circle
full class number
full cluster set
full co-amplification at lower denaturation temperature-PCR,COLD-PCR
full coherence
Full Collection of Tang Poems
full color display
full-color image
full commitment ability
full containment tank
full control rectifier circuit
full cost price of water
Full Coverage of Digital Educational Resources in Small Rural Primary Schools
full-covered budget
full custom design
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更新时间:2026/6/28 10:03:25