“silicon-based micro electro-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based micro electro-mechanical system
释义	silicon-based micro electro-mechanical system Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	ruderal plant Ruderman-Kittel-Kasuya-Yosida model Ruderman-Kittel-Kasuya-Yosida model, RKKY model rudiment rudimentary closure rudimentary function rudimentary horn of the uterus rudimentary organ rudimentary predicate rudimentary set Rudin Rudio Rudists Ruditapes philippinarum“Zebra” rudite Rudolf Arnheim Rudolf Bultmann Rudolf Carnap Rudolf Christian Karl Diesel Rudolf Christoph Eucken Rudolf Diesel Rudolf Emil Kalman Rudolf Emil Kálmán Rudolff Rudolf Friedrich Alfred Clebsch

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