“silicon-based micro electro-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based micro electro-mechanical system
释义	silicon-based micro electro-mechanical system Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	saturation conjecture saturation current saturation deficit saturation degree of dissolved gases in seawater saturation density saturation dip saturation diving saturation effect saturation effect of atomic fluorescence saturation factor saturation front advance equation saturation function saturation indices saturation intensity saturation magnetic recording saturation magnetization saturation magnetostriction saturation mutagenesis saturation order saturation phenomenon of approximation saturation point saturation pressure of reservoir-crude saturation pump saturation scale saturation spectroscopy

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