“silicon-based micro electro-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based micro electro-mechanical system
释义	silicon-based micro electro-mechanical system Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	I-line lithography technology iliolumbar artery Il Khanate Ilkovic equation Ilkovič equation ILL ill-behaved function ill-conditioned ill-conditioned eigenvalue ill-conditioned eigenvector ill-conditioned equation ill-conditioned matrix ill-conditioned model ill-conditioned polynomial ill-conditioning ill-defined ill-defined function ill-defined problem illegal acquisition of computer information system data illegal code illegal control on computer information system illegal employer Illegal Entry illegal feed additive illegal fishing

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