“silicon-based micro electro-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based micro electro-mechanical system
释义	silicon-based micro electro-mechanical system Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	quaternion norm quaternion ring quaternions algorithm quaternion skew field quaternion unimodular group quaternion vector bundle quatic animal feed pelleting process quatic germplasm resources conservation zones quattuordecillion quayside container crane Qubai Babuqi Pian Qubai Maribairesi Wan qubic Qubilai Emperor Shizu of Yuan Dynasty qubin qubit qubits Qu Bo qubyte qucha quchi Quchongbanjiuju Quchongbanjiuju Zhusheye Qucun flood diversion sluice Qucun-Tianma

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