“silicon-based micro electro-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based micro electro-mechanical system
释义	silicon-based micro electro-mechanical system Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	blanket of Derung nationality blanket order blanket policy blanket structure material blanket with confronted griffins on hexagon grid blank field blanking blank peeling blank run blank solution blank test blank test value blank value Blank Vrese Blantyre BLAS BLAS (Basic Linear Algebra Subprograms) Blaschke Blaschke condition Blaschke conjecture Blaschke factor Blaschke factorization Blaschke function Blaschke inequality Blaschke manifold

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