“silicon-based micro electro-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based micro electro-mechanical system
释义	silicon-based micro electro-mechanical system Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	potassium-argon method potassium bromate method potassium bromide potassium-calcium dating potassium-calcium method potassium carbonate potassium channel potassium channel openers potassium chlorate potassium chloride potassium chromate potassium compounds potassium cyanide potassium dichromate potassium dichromate method potassium dichromate regulator Potassium Dihydrogen Phosphate crystal potassium dihydrogen phosphate crystal potassium drilling fluid potassium extraction from sea water potassium ferrate potassium ferricyanide potassium ferrocyanide potassium fertilizer potassium hexacyanoferrate(III)

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