“silicon-based micro electro-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based micro electro-mechanical system
释义	silicon-based micro electro-mechanical system Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	vertical cavity surface emitting laser vertical-cavity surface-emitting laser vertical-cavity surface-emitting laser, VCSEL vertical channel three dimensional flash vertical circle vertical circulating mechanical parking system vertical cleavage vertical component vertical conduit flow phase state vertical coordinate transform vertical cross lapper vertical cross-section vertical cultivation vertical current velocity observation vertical curve vertical decelerator vertical design of livestock farm area vertical detachment energy vertical disintegration vertical disposition of chord-tone vertical distribution vertical distribution of temperature vertical divestiture vertical dominance vertical double diffusion metal-oxide-semiconductor field effect transistor

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