“silicon-based micro electro-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based micro electro-mechanical system
释义	silicon-based micro electro-mechanical system Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	Gezidong human remains Gezira, El Gezishan Site Ge Zuozhi Ge γ-ray detector Ge’ez literature Ge⍥cze area GF GF-4 imaging satellite in geostationary orbit GFAAS G factor G-factor g factor g-factor g factor, g-factor G factorization G-factorization G. F. A. de L'Hospital G.-F.-A. de L'Hospital G.-F.-A. de L'Hospital (1661—1704) G. Faltings G. Faltings (1954—) G. Fano G. Fano (1871—1952) GFAP

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