“silicon-based micro electro-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based micro electro-mechanical system
释义	silicon-based micro electro-mechanical system Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	hydro-magnetic bearing hydromagnetic bubble hydromagnetic cavity hydromagnetic disturbance hydromagnetic dynamo hydromagnetic dynamo mechanism hydromagnetic instability hydromagnetics hydromagnetic shock-wave hydromagnetic wave hydromagnetism hydromagnetodynamo hydromagnetodynamo mechanism hydromanometer hydromatic hydro-mechanical transmission hydromechanics hydromechanics, fluid mechanics hydrometallation hydrometallurgy hydrometallurgy of Rare earth hydro-meteorological disaster hydrometeorological disaster hydrometeorological elements hydrometeorology

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