“silicon-based micro electro-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based micro electro-mechanical system
释义	silicon-based micro electro-mechanical system Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	fault current limiter fault detection fault detection indicators fault diagnosis fault diagnosis for crushing equipment fault diagnosis for grinding and classification process fault diagnosis for refrigeration system fault diagnosis for rod pumping unit fault diagnosis in industrial system fault diagnosis method based on analytical model fault diagnosis method based on data driven fault diagnosis method based on Kullback discrimination information fault diagnosis method based on qualitative knowledge fault diagnosis of internal combustion engine fault diagnostic program fault diagnostic routine fault diagnostic system fault diagnostic test fault dislocation surveying fault dominance faulted coal basin fault entropy fault estimation fault evolution of rotor systems fault feature extraction

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。