“silicon-based micro electro-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based micro electro-mechanical system
释义	silicon-based micro electro-mechanical system Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	bio-inspired machine intelligence bio-inspired robot bio-inspired vision bio-interface bioinventory bioisostere bio-jet fuel Bioko Island Bioko Norte biolabel biolabeling biolabeling nanomaterials bio-landscape of scenic regions biolaser bioleaching bioleaching in shaking flasks test bioleaching microbial migration bioleaching mining bioleaching-solvent extraction-electrodeposition process biolipids biolite Biological Abstracts biological acoustics biological activated carbon sewage treatment biological activity measurement

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