“silicon-based micro electro-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based micro electro-mechanical system
释义	silicon-based micro electro-mechanical system Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	cylinder cutting cylinder-cylinder intersection cylinder deactivation technology cylinder deformation cylinder dissection cylinder former cylinder function cylinder functor cylinder head cylinder-head-sector addressing cylinder ionization chamber cylinder mirror analyzer cylinder mirror analyzer (CMA) cylinder mower cylinder needling machine cylinder of centrifugal compressor cylinder parabolic mirror cylinder-plane intersection cylinder record cylinder reducing valve cylinders Cylinder Seal of West Asia cylinder set cylinder sigma-algebra cylinder-sphere intersection

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