“silicon-based MEMS”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based MEMS
释义	silicon-based MEMS Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	existence criterion existence domain existence factors existence form of element existence limit of nucleus existence of best approximation existence of lift existence of required elements of crime existence precedes essence existence principle existence problem existence proof existence property existence region existence symbol existence theorem existence theorem for roots existential existential closure existential condition existential formula existential generalization existential illumination existentialism existentialism methodology of psychology

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