“silicon-based MEMS”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based MEMS
释义	silicon-based MEMS Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	Henry Dall Henry David Thoreau Henry de Bracton Henry Draper catalog Henry Draper catalogue Henry Draper classification Henry Draper Extension Henry Draper stellar classification Henry Draper system Henry Dreyfuss Henry Eyring Henry Fielding Henry Fonda Henry Ford Henry Ford Museum of American Innovation Henry Fuseli Henry George Henry Green Henry Guerlac Henry Gwyn Jeffreys Moseley Henry Hallam Henry Hallett Dale Henry Handel Richardson Henry Heng Hsu Henry Hobson Richardson

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