“silicon-based MEMS”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based MEMS
释义	silicon-based MEMS Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	normalization theorem normalization theory normalized normalized Abelian differential normalized additive character normalized algebra normalized basis normalized chain complex normalized complex normalized condition normalized contrast normalized coordinate normalized cut normalized difference normalized difference snow index normalized difference vegetation index normalized distribution normalized eigenfunction normalized eigenvector normalized Eisenstein series normalized equation normalized form normalized function normalized functor normalized Hadamard matrix

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