“silicon-based MEMS”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based MEMS
释义	silicon-based MEMS Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	instantaneous value instantaneous velocity instant copy instant enforcement instantiate instantiation instant message instant message, IM instant messager instant messaging instant messaging data examination instant messaging data file instant messaging protocol instant messaging service instanton instanton homology instant online celebrities instanton vector bundle instant photography film instant radiosity instant Radon meter instant selection instant tea instar in state

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