“silicon-based MEMS”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based MEMS
释义	silicon-based MEMS Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	tangent subspace tangent surface tangent theorem tangent to a curve tangent transformation tangent-trapezoidal method tangent vector tangent vector bundle tangent vector field tangent vector space Tangerines tangerine seed Tangfeng Tangfeng Ji Tang Geng Tang Gengliang Tang Gengliang narrated and performed a Long Suzhou Pinghua: The Three Kingdoms Tanggu (drum) of Wujiali Village, Guilin City Tang Guizhang Tanggu Jiedao Tanggula (Dangla) Shan Tanggula Mountain-Nujiangyuan Scenic and Historic Area Tanggula Shankou Tanggula Shanmai Tanggulashan Zhen

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