“silicon-based MEMS”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based MEMS
释义	silicon-based MEMS Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	The Lyres of Ur Thelytoky thelytoky The Lyttleton Constitution of 1954 Them The Macau Yongle Grand Theater the machine for archives mounting The Magazine of Art The Magazine of Taibai The Magic Braid The Magic Brush The Magic Gourd The Magician of Lublin The Magistrate's Assistant The Magistrate Tried a Titled Lady the magnetic carrier archives the magnetic-carries-archives protection method the magnetism of rock the magnetoelastic effect of rock The Magnolia Award The Magnolia Awards The Maid Silja The Maid’s Tragedy the Maillard reaction scenting The Main-Branch Library System in the United Library of Chancheng District of Foshan City

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