“silicon-based MEMS”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based MEMS
释义	silicon-based MEMS Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	convection instability convection number Convection rotation and planetary transits Convection Rotation and Planetary Transits satellite convection zone convection zone of the Sun Convection，Rotation and planetary Transits convective convective acceleration convective available potential energy convective beam-plasma instability convective cell convective condensation convective cooling convective core convective derivative convective dynamics convective envelope convective equilibrium convective heat accumulation convective heat flow convective heating surface convective heat passage convective inhibition convective initiation

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