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silicon-based MEMS
释义
silicon-based MEMS
Encyclopedia
工学
微纳器件
释
silicon-based micro electro-mechanical system; silicon-based MEMS
硅基微机电系统
在硅、绝缘体上硅(silicon-on-insulator,SOI)等基底材料的基础上,应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
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laterality
lateralization of brain function
lateral line
lateral line organ
lateral lobe
lateral loop
laterally rheological segmentation
lateral magnification
lateral malleolus
lateral meristem
lateral misalignment
lateral mode
lateral molecular diffusion
lateral moraine
lateral motion
lateral nerve cord
lateral order
lateral oscillatory characteristic
lateral overlap
lateral patterns in hanging
lateral phototropism
lateral plan
lateral point
lateral porechamber
lateral pressure
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更新时间:2026/7/3 14:19:12