“silicon-based MEMS”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based MEMS
释义	silicon-based MEMS Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	unramified semilocal ring unramified subfield unramified surface unranked officials unreacted unreacted core model unreactive unreasonable resonance structure unreclaimed unrectifiable set unreduced cell unreducible unreflected unregistered deed unregistered household and residence unregulated fishing unrelated unrelated allogeneic hematopoietic stem cell transplantation unrelated dances and acts in early American musical theater (variety entertainment) unreliability unreliable unremovable unrenormalizable theory unrenormalized quantity unreported fishing

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