“silicon-based MEMS”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based MEMS
释义	silicon-based MEMS Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	degree of a vertex degree of blood oxygen saturation degree of branching degree of bulkiness degree of character degree of closing degree of cocoon cooking degree of coherence degree of compaction degree of completeness degree of complexity degree of concentration degree of confidence degree of convergence degree of correlation degree of covering degree of crosslinking degree of crystallinity degree of crystallinity; crystallinity degree of degeneracy degree of direct reduction degree of dispersion degree of dissociation degree of entanglement degree of excitation

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