“silicon-based MEMS”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based MEMS
释义	silicon-based MEMS Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	irritant gases poisoning irritation index IRRM irrotational irrotational field irrotational flow model irrotationality irrotational motion irrotational motion with circulation irrotational vector field irrotational wave Irr Ⅰ galaxy Irr Ⅱ galaxy IRS IRSA IR seeker I. R. Shafarevich I. R. Shafarevich (1923—2017) IR spectroscopy IRSTEA IR stimulated luminescence IRT IRTF IR transmission photography irtron

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