“silicon-based MEMS”的概念、定义、翻译、参考文献-科学参考

单词	silicon-based MEMS
释义	silicon-based MEMS Encyclopedia 工学微纳器件释 silicon-based micro electro-mechanical system; silicon-based MEMS硅基微机电系统在硅、绝缘体上硅（silicon-on-insulator，SOI）等基底材料的基础上，应用半导体微加工技术制造的各种微传感器、微执行器以及微系统的总称。
随便看	World Press Photo World Professional Billiards & Snooker Association World Publishing House world radius World Rally Championship world records World Reference Base for Soil Resources World Regional Studies world religion World Report on Child Injury Prevention World report on road traffic injury prevention World Resources World Resources Institute World-Revealing Cup World Risk and Insurance Economics Congress World Rowing World Rugby World Sailing World Sea Routes world sheet worldsheet worldsheet field contents worldsheet metric worldsheet supersymmetry World Snooker Championship

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