“shallow trench isolation”的概念、定义、翻译、参考文献-科学参考

单词	shallow trench isolation
释义	shallow trench isolation Encyclopedia 工学CMOS工艺释 shallow trench isolation;STI浅槽隔离集成电路制造中，防止相邻半导体器件之间由于电场延伸串扰产生寄生漏电流的高级隔离工艺技术。
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