“sacrificial layer technology”的概念、定义、翻译、参考文献-科学参考

单词	sacrificial layer technology
释义	sacrificial layer technology Encyclopedia 工学磁致动器释 sacrificial layer technology牺牲层技术在表面微加工工艺中，为形成微机械结构的空腔或可活动的微结构，先在下层薄膜上沉积所需的结构件，再用化学刻蚀剂将此层薄膜腐蚀掉而不损伤微结构件，得到上层薄膜结构（空腔或微结构件）的加工方法。
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