“sacrificial layer technology”的概念、定义、翻译、参考文献-科学参考

单词	sacrificial layer technology
释义	sacrificial layer technology Encyclopedia 工学磁致动器释 sacrificial layer technology牺牲层技术在表面微加工工艺中，为形成微机械结构的空腔或可活动的微结构，先在下层薄膜上沉积所需的结构件，再用化学刻蚀剂将此层薄膜腐蚀掉而不损伤微结构件，得到上层薄膜结构（空腔或微结构件）的加工方法。
随便看	negative side negative sign negative skewness negative skin friction of piles negative spinor negative stable matrix negative staining negative strand negative stress negative subspace negative supercoiling negative surface energy negative system of roots negative temperature negative temperature coefficient negative term negative thermal expansion negative thermal expansion material negative thixotropy negative transitivity negative uniaxial crystal negative value negative variation negative variation of a function negative variation of signed measure

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