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sacrificial layer technology
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sacrificial layer technology
Encyclopedia
工学
磁致动器
释
sacrificial layer technology
牺牲层技术
在表面微加工工艺中,为形成微机械结构的空腔或可活动的微结构,先在下层薄膜上沉积所需的结构件,再用化学刻蚀剂将此层薄膜腐蚀掉而不损伤微结构件,得到上层薄膜结构(空腔或微结构件)的加工方法。
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Explanatory Dictionary of Erya
Explanatory Dictionary of Expanded Erya
explanatory note
Explanatory Notes to the Book of Songs
explanatory variable
explant
explement of angle
explication
explicit
explicit Adams formula
explicit artificial boundary conditions
explicitation in translation
explicit attitude
explicit behavior
explicit calculation
explicit computation
explicit construction
explicit contract
explicit definition
explicit description
explicit difference equation
explicit difference formula
explicit difference scheme
explicit differential equation
explicit equation
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更新时间:2025/7/3 16:29:23