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reflective plasmonic lithography
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reflective plasmonic lithography
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等离子体光刻
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reflective plasmonic lithography
反射式等离子体光刻
通过在光刻胶下方引入金属反射层结构,以提高表面等离子体光刻分辨力、对比度及焦深的等离子体光刻技术。
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