“reactive ion etching”的概念、定义、翻译、参考文献-科学参考

单词	reactive ion etching
释义	reactive ion etching Encyclopedia 工学磁致动器释 reactive ion etching反应离子刻蚀将物理性的离子溅射刻蚀和化学性的等离子刻蚀两种方法相结合的物理/化学刻蚀技术。 Physics 凝聚态物理学结构 reactive ion etching反应离子刻蚀
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