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reactive ion etching
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reactive ion etching
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reactive ion etching
反应离子刻蚀
将物理性的离子溅射刻蚀和化学性的等离子刻蚀两种方法相结合的物理/化学刻蚀技术。
Physics
凝聚态物理学
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reactive ion etching
反应离子刻蚀
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