“rapid thermal anneal”的概念、定义、翻译、参考文献-科学参考

单词	rapid thermal anneal
释义	rapid thermal anneal Encyclopedia 工学杂质扩散工艺释 rapid thermal anneal快速热退火在极短的时间内，通过快速升降温在高温下实现半导体材料掺杂激活与缺陷修复的半导体制造工艺技术。是一种快速热处理工艺。
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