“pyrolytic chemical vapor deposition”的概念、定义、翻译、参考文献-科学参考

单词	pyrolytic chemical vapor deposition
释义	pyrolytic chemical vapor deposition Encyclopedia 工学化学气相沉积释 pyrolytic chemical vapor deposition热解化学气相沉积在简单的单温区炉中，在真空或惰性气体保护下加热基体至所需温度后导入反应气体使之发生热解反应，最后在基体上沉积出固相涂层的方法。
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