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pulsed metal-organic chemical vapor deposition
释义
pulsed metal-organic chemical vapor deposition
Encyclopedia
工学
半导体外延生长
释
pulsed metal-organic chemical vapor deposition
脉冲式金属有机化合物气相沉积
将Ⅲ族金属有机化合物与Ⅴ族氢化物或烷基化合物,以脉冲相间隔交替的方式通入化学沉积系统反应室,在高温反应室中分解并在衬底上沉积生成化合物的技术。简称PMOCVD。
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