“physical/chemical vapor deposition”的概念、定义、翻译、参考文献-科学参考

单词	physical/chemical vapor deposition
释义	physical/chemical vapor deposition Encyclopedia 工学微纳机电系统释 physical/chemical vapor deposition气相沉积利用气相中发生的物理或化学过程，在工件表面形成功能性或装饰性的金属、非金属、化合物单层或多层薄膜的技术。
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