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photo lithography
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photo lithography
Encyclopedia
工学
光刻技术
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photo lithography
光刻技术
集成电路制造中利用光学-化学反应原理和化学、物理刻蚀方法,将电路图形传递到单晶表面或介质层上,形成有效图形窗口或功能图形的工艺技术。
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