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outside gettering
释义
outside gettering
Encyclopedia
工学
半导体单晶片吸除技术
释
outside gettering
外吸除
对硅片背表面施加一定的处理,如背面打毛、离子注入、浓磷、硼扩散、淀积多晶硅层等,形成晶格损伤和应力,产生的吸除。
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更新时间:2026/11/2 16:55:17