“outside gettering”的概念、定义、翻译、参考文献-科学参考

单词	outside gettering
释义	outside gettering Encyclopedia 工学半导体单晶片吸除技术释 outside gettering外吸除对硅片背表面施加一定的处理，如背面打毛、离子注入、浓磷、硼扩散、淀积多晶硅层等，形成晶格损伤和应力，产生的吸除。
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