“on-line aberration”的概念、定义、翻译、参考文献-科学参考

单词	on-line aberration
释义	on-line aberration Encyclopedia 工学光刻机测量系统释 on-line aberration在线波像差检测基于曝光显影后的图像形状改变、空间像的位置改变，波前相位直接探测原理而进行的波像差测量方法。该测量直接在光刻机上进行，可定义为在线波像差测量系统。
随便看	undamped system undec- undeca- undecagon undecahedron undecaprenol undecidability undecidability theorem undecidable undecidable formula undecidable problem undecidable proposition undecidable theory undecillion undecimal undecimal number system undecimal system undecomposable undefinability undefined undefined concept undefined symbol undefined technical term undefined term undeflected

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