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单词
MOVPE
释义
MOVPE
Encyclopedia
工学
【半导体工艺技术】
释
metal organic vapor phase epitaxy; MOVPE
金属有机气相外延
以热分解反应为基础的气相外延法。
理学
金属有机化学气相沉积
释
metal-organic chemical vapor deposition; MOCVD; MOVPE; OMVPE; OMCVD
金属有机物化学气相沉积
利用有机金属热分解反应进行气相外延生长薄膜的化学气相沉积技术。
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