“microwave plasma chemical vapor deposition”的概念、定义、翻译、参考文献-科学参考

单词	microwave plasma chemical vapor deposition
释义	microwave plasma chemical vapor deposition Encyclopedia 工学化学气相沉积释 microwave plasma chemical vapor deposition; MPCVD微波等离子体化学气相沉积用微波放电产生等离子体进行化学气相沉积的方法。
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