“microwave plasma”的概念、定义、翻译、参考文献-科学参考

单词	microwave plasma
释义	microwave plasma Encyclopedia 工学﹝等离子体驱动形式﹞释 microwave plasma; MWP微波等离子体微波源将微波能量转换为气体分子的内能，使之激发、电离能产生的等离子体。理学气体放电释 microwave plasma微波等离子体利用高频电磁波使工作气体电离击穿而产生的等离子体。应用于产生微波等离子体的频率一般是0.915吉赫和2.45吉赫，其中2.45吉赫微波使用更为普遍。
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