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micro/nano robotics
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micro/nano robotics
微/纳操作机器人
包括微纳操作机器人与微纳尺度机器人两大类,微纳操作机器人具有微纳米级的超高精度运动与作业性能,在诸如分子生物实验操作、集成电路芯片装配和超精密制造加工等超精密作业场所具有广泛的应用前景;微纳尺度机器人在尺度上涵盖了微小至微纳米量级范围,尺寸在1毫米以下为微纳尺度机器人。
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