“micro/nano mechatronic”的概念、定义、翻译、参考文献-科学参考

单词	micro/nano mechatronic
释义	micro/nano mechatronic Encyclopedia 工学机电一体化释 micro/nano mechatronic微纳机电一体化微纳机电系统（MEMS/NEMS）将处理热、光、磁、化学、生物等结构和器件通过微电子工艺及其他微加工工艺，制作到芯片上，并通过与电路相互之间的高度集成来构筑复杂的微型系统。
随便看	finishing-cut finishing mill finishing needle loom finishing pass finishing pig house finishing point finishing well finish machining finish quality control finish quality control, FQC finish segment finish segment, FIN finishthe tape finitarily solvable formula finitarily verifiable formula finitary finitary algebra finitary mathematics finitary method finitary operation finitary problem finitary proof finitary proof theory finitary spread finitary standpoint

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