“micro/nano mechatronic”的概念、定义、翻译、参考文献-科学参考

单词	micro/nano mechatronic
释义	micro/nano mechatronic Encyclopedia 工学机电一体化释 micro/nano mechatronic微纳机电一体化微纳机电系统（MEMS/NEMS）将处理热、光、磁、化学、生物等结构和器件通过微电子工艺及其他微加工工艺，制作到芯片上，并通过与电路相互之间的高度集成来构筑复杂的微型系统。
随便看	limit number limit of a filter limit of a function limit of a functor limit of a mapping limit of a morphism limit of a root limit of a sequence limit of a sequence of groups limit of a sequence of lattices limit of a sequence of points limit of a sequence of sets limit of a sequence of subsets limit of a set limit of a spectrum limit of bankcruptcy limit of elasticity limit of error Limit of Heat limit of indeterminacy limit of integration limit of range limit of saturation limit of starlikeness limit on one side

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