“micro/nano mechatronic”的概念、定义、翻译、参考文献-科学参考

单词	micro/nano mechatronic
释义	micro/nano mechatronic Encyclopedia 工学机电一体化释 micro/nano mechatronic微纳机电一体化微纳机电系统（MEMS/NEMS）将处理热、光、磁、化学、生物等结构和器件通过微电子工艺及其他微加工工艺，制作到芯片上，并通过与电路相互之间的高度集成来构筑复杂的微型系统。
随便看	Chemistry chemistry Chemistry and Industry of Forest Products chemistry at Harvard macromolecular mechanics chemistry at Harvard macromolecular mechanics, CHARMM chemistry gas composition analysis chemistry of americium (Ⅲ) chemistry of Chinese medicines chemistry of cluster compound chemistry of element chemistry of elements chemistry of energy source chemistry of forest products chemistry of pine oleoresin chemistry of rare gas chemistry of salt lake chemistry of salt lake resource chemistry of sea water resources chemistry of silicate chemistry of soil pollution chemistry of surrogates of chlorofluorocarbons chemistry of the atmospheric aqueous phase chemistry of the solar system chemistry of the stratosphere chemistry of the troposphere

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