“micro/nano mechatronic”的概念、定义、翻译、参考文献-科学参考

单词	micro/nano mechatronic
释义	micro/nano mechatronic Encyclopedia 工学机电一体化释 micro/nano mechatronic微纳机电一体化微纳机电系统（MEMS/NEMS）将处理热、光、磁、化学、生物等结构和器件通过微电子工艺及其他微加工工艺，制作到芯片上，并通过与电路相互之间的高度集成来构筑复杂的微型系统。
随便看	adjustment of posture adjustment of respiration adjustment of soil air condition adjustment of systematic error of survey line adjustment parameter Adjustment, reform, rectification and improvement of the national economy adjustment residual adjustments and reconstructions of Chinese sociology adjustment time adjustment value adjutant role in Canjun opera adjuvant ADL AD languages Adleman Adler Adler anomaly Adler-Bell-Jackiw anomaly Adler-Bell-Jackiw anomaly, ABJ anomaly Adlerian therapy Adler's view of criminality ad libitum feeding ad libitum intake or voluntary feed intake Adlivun Cavus ADM

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