“micro/nano mechatronic”的概念、定义、翻译、参考文献-科学参考

单词	micro/nano mechatronic
释义	micro/nano mechatronic Encyclopedia 工学机电一体化释 micro/nano mechatronic微纳机电一体化微纳机电系统（MEMS/NEMS）将处理热、光、磁、化学、生物等结构和器件通过微电子工艺及其他微加工工艺，制作到芯片上，并通过与电路相互之间的高度集成来构筑复杂的微型系统。
随便看	chain fern chain fern family chain fern genus chain file chain fission yield chain flexibility chain folded lamellar crystals chain-folded lamellar crystals chain folding chain fraction chain geometry chain graph chain grate furnace chain group chain growth chain growth catalyst transfer condensation polymerization chain growth catalyst transfer polycondensation chain growth; chain propagation chain homology chain homomorphism chain-homotopic chain-homotopic homomorphisms chain-homotopic mapping chain homotopy chain homotopy class

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