“micro/nano mechatronic”的概念、定义、翻译、参考文献-科学参考

单词	micro/nano mechatronic
释义	micro/nano mechatronic Encyclopedia 工学机电一体化释 micro/nano mechatronic微纳机电一体化微纳机电系统（MEMS/NEMS）将处理热、光、磁、化学、生物等结构和器件通过微电子工艺及其他微加工工艺，制作到芯片上，并通过与电路相互之间的高度集成来构筑复杂的微型系统。
随便看	chemical exchange chemical explosion chemical extraction chemical factor analysis chemical fertilizer chemical fertilizer industry chemical fertilizer pollution chemical fertilizer pollution prevention and control law chemical fertilizer wastewater chemical fiber chemical fiber drawing chemical fiber forming chemical fiber garment chemical fiber heatsetting chemical fiber industry chemical fiber mattress chemical fiber pillow chemical fiber quilt chemical fibers chemical fiber spinning chemical flooding chemical foaming chemical foaming agent chemical for flat panel display chemical formula

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