“micro/nano mechatronic”的概念、定义、翻译、参考文献-科学参考

单词	micro/nano mechatronic
释义	micro/nano mechatronic Encyclopedia 工学机电一体化释 micro/nano mechatronic微纳机电一体化微纳机电系统（MEMS/NEMS）将处理热、光、磁、化学、生物等结构和器件通过微电子工艺及其他微加工工艺，制作到芯片上，并通过与电路相互之间的高度集成来构筑复杂的微型系统。
随便看	antiquark anti-quaternion Antique Mei Flower Paper in Qianlong era Antiquities Preservation Law antiquity anti radiation agent anti-radiation agent antiradiation agent anti-radiation attack anti-radiation concrete anti-radiation decoy anti-radiation fiber anti-radiation functional composites anti-radiation missile anti-radiation unmanned aerial vehicle anti-radiation warhead antiradical anti-ram vehicle barrier antireciprocity Anti-Reelectionist Party anti reference wave anti-reference wave anti reflecting film anti-reflecting film antireflecting film

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