“micro/nano mechatronic”的概念、定义、翻译、参考文献-科学参考

单词	micro/nano mechatronic
释义	micro/nano mechatronic Encyclopedia 工学机电一体化释 micro/nano mechatronic微纳机电一体化微纳机电系统（MEMS/NEMS）将处理热、光、磁、化学、生物等结构和器件通过微电子工艺及其他微加工工艺，制作到芯片上，并通过与电路相互之间的高度集成来构筑复杂的微型系统。
随便看	insight insight of decision-making scenario of mega project insight theory insignificant In Silence in silico cloning insimilicenter in-situ in situ acceleration in situ air sampling in situ air sparging in situ analysis in situ analysis technolog for soil organisms in-situ bioleaching in-situ blasting technology in situ brightening in-situ chemical oxidation in-situ combined loading tester in-situ combustion in-situ combustion device in-situ combustion production in-situ composites in situ conservation in situ conservation of fishery organisms in-situ crushing leaching mining method

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