“micro/nano mechatronic”的概念、定义、翻译、参考文献-科学参考

单词	micro/nano mechatronic
释义	micro/nano mechatronic Encyclopedia 工学机电一体化释 micro/nano mechatronic微纳机电一体化微纳机电系统（MEMS/NEMS）将处理热、光、磁、化学、生物等结构和器件通过微电子工艺及其他微加工工艺，制作到芯片上，并通过与电路相互之间的高度集成来构筑复杂的微型系统。
随便看	coolant materials coolant pump cool component cool down cool dwarf cooled camera cooled mold cooled parametric amplifier cooled Schottky-barrier mixer cooled stability superconductivity cooler Cooley Cooley-Tukey algorithm cool flame cool flame combustion cool frame bender cool giant Coolidge Coolidge Prosperity cooling cooling and drafting Unit cooling and heating source equipment cooling and heating source equipment room cooling bed cooling blood for calming endogenous wind

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