“micro/nano mechatronic”的概念、定义、翻译、参考文献-科学参考

单词	micro/nano mechatronic
释义	micro/nano mechatronic Encyclopedia 工学机电一体化释 micro/nano mechatronic微纳机电一体化微纳机电系统（MEMS/NEMS）将处理热、光、磁、化学、生物等结构和器件通过微电子工艺及其他微加工工艺，制作到芯片上，并通过与电路相互之间的高度集成来构筑复杂的微型系统。
随便看	generalized linear models with penalization generalized linear system generalized linear viscoelastic model generalized local extremum generalized LR algorithm generalized main sequence generalized manifold generalized mapping generalized master equation generalized Mathieu function generalized matrix inverse generalized matrix Padé approximation generalized max-flow generalized Maxwell model generalized m dimensional simplex generalized m-dimensional simplex generalized mean generalized mean curvature generalized measure generalized method of moment generalized method of moments，GMM generalized metric space generalized min-cost flow generalized minimal residual method generalized minimal surface

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