“micro/nano mechatronic”的概念、定义、翻译、参考文献-科学参考

单词	micro/nano mechatronic
释义	micro/nano mechatronic Encyclopedia 工学机电一体化释 micro/nano mechatronic微纳机电一体化微纳机电系统（MEMS/NEMS）将处理热、光、磁、化学、生物等结构和器件通过微电子工艺及其他微加工工艺，制作到芯片上，并通过与电路相互之间的高度集成来构筑复杂的微型系统。
随便看	stemming stemming machine stemness stemona alkaloid stemona family stemona root stem or branch shriveling in early spring stem sawflies stem spermatogonium mediated method stencil stencil frame stencil printing Stendhal steneotarsonemus spinki smiley stenfan-boltzmann law Stenian Period stenochoric species stenography stenohaline organism stenophagy stenosis of aortic orifice stenosis of carotid artery stenosis of digestive tract stenothermal stenothermal organism

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