“micro/nano mechatronic”的概念、定义、翻译、参考文献-科学参考

单词	micro/nano mechatronic
释义	micro/nano mechatronic Encyclopedia 工学机电一体化释 micro/nano mechatronic微纳机电一体化微纳机电系统（MEMS/NEMS）将处理热、光、磁、化学、生物等结构和器件通过微电子工艺及其他微加工工艺，制作到芯片上，并通过与电路相互之间的高度集成来构筑复杂的微型系统。
随便看	positive drawing positive drive lift positive dromotropic action positive edge positive effect of organizational communication positive eigenvalue positive eigenvalued matrix positive eigenvector positive electron positive element positive emitter-coupled logic positive emitter-coupled logic, PECL positive endomorphism positive energy positive-energy representation positive energy states positive energy theorem positive energy wave positive entropy positive excess coefficient positive existential sentence positive extension positive eyepiece positive feedback positive feedback amplifier

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