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micromechanical gyroscope
释义
micromechanical gyroscope
Encyclopedia
工学
陀螺仪
释
micromechanical gyroscope
微机械陀螺仪
采用半导体生产中成熟的沉积、蚀刻和掺杂等工艺,将机械装置和电子线路集成在微小的硅芯片上完成,最终形成一种集成电路芯片大小的微型陀螺仪。是陀螺仪技术与微电子机械系统(MEMS)技术结合产生的新一代惯性器件。又称MEMS陀螺仪、硅微陀螺仪。
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interacting system
interactioin length
interaction
interaction adaptation theory
Interactional Linguistics
Interactional Sociolinguistics
interaction among tree species
interaction analysis
interaction between charged particle and electromagnetic field
interaction between climate change and terrestrial ecosystems
interaction between electromagnetic wave and atmosphere
interaction between genders
interaction between high energy electrons and nuclei
interaction between ion beam and solid
interaction between pantographs and overhead contact line
interaction between particle and solid
interaction between port and city
interaction between rotor and stator
interaction between shock wave and boundary layer
interaction between shock wave and boundary layer experiment
interaction between support and surrounding rock
interaction between terahertz wave and matters
interaction between wave and floating body
interaction between wheel and rail
interaction boson fermion model
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