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micromechanical gyroscope
释义
micromechanical gyroscope
Encyclopedia
工学
陀螺仪
释
micromechanical gyroscope
微机械陀螺仪
采用半导体生产中成熟的沉积、蚀刻和掺杂等工艺,将机械装置和电子线路集成在微小的硅芯片上完成,最终形成一种集成电路芯片大小的微型陀螺仪。是陀螺仪技术与微电子机械系统(MEMS)技术结合产生的新一代惯性器件。又称MEMS陀螺仪、硅微陀螺仪。
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second-nearest neighbor
second Neuberg circle
second Neuberg point
second Neuberg triangle
second normal form
second normal form, 2NF
second normal stress difference
second number-class
second of arc
second of time
second open
Second Opium War
second order
second-order advantage
second order arithmetic
second-order arithmetic
second-order calibration and three-way calibration
second-order circuit
second order coherence
second-order coherence
second-order coherence and second-order correlation function
second-order constraint qualification
second order correlation
second order correlation function
second-order correlation function
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