“micromechanical gyroscope”的概念、定义、翻译、参考文献-科学参考

单词	micromechanical gyroscope
释义	micromechanical gyroscope Encyclopedia 工学陀螺仪释 micromechanical gyroscope微机械陀螺仪采用半导体生产中成熟的沉积、蚀刻和掺杂等工艺，将机械装置和电子线路集成在微小的硅芯片上完成，最终形成一种集成电路芯片大小的微型陀螺仪。是陀螺仪技术与微电子机械系统(MEMS)技术结合产生的新一代惯性器件。又称MEMS陀螺仪、硅微陀螺仪。
随便看	Scd 型星系 SCE Sceaux Park SCEC scedastic scedastic curve scedastic equation scedasticity scedastic line scedastic transformation SCEJ scelionids scenario analysis scenario analysis method Scenario analysis of environmental projection scenario based method scenario-based requirements modeling scenario development scenario forecasting method scenario of decision-making of mega project scenario planning scenario robust decision on mega project scenario-robustness on mega infrastructure engineering decision-making scenarios of land use planning scenario visualization

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