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micromechanical gyroscope
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micromechanical gyroscope
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工学
陀螺仪
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micromechanical gyroscope
微机械陀螺仪
采用半导体生产中成熟的沉积、蚀刻和掺杂等工艺,将机械装置和电子线路集成在微小的硅芯片上完成,最终形成一种集成电路芯片大小的微型陀螺仪。是陀螺仪技术与微电子机械系统(MEMS)技术结合产生的新一代惯性器件。又称MEMS陀螺仪、硅微陀螺仪。
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plane circular restricted three-body problem
plane component
plane-concave lens
plane configuration
plane control survey
plane-convex lens
plane coordinate
plane coordinates
plane cubic
plane curve
plane curve location
plane cutting
plane dihedral angle
planed immunization
plane division by circles
plane division by ellipses
plane division by lines
plane domain
plane electromagnetic wave
plane except one point
plane field
plane field of lines
plane figure
plane-filling curve
plane-filling function
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