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microenvironment air supply system
释义
microenvironment air supply system
Encyclopedia
工学
空气净化系统
释
microenvironment air supply system
微环境送风系统
针对半导体芯片生产的高洁净度要求而建的局部小区域送风系统。于1984年在美国出现。
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set of generators of a module
set of greater power
Set of Identifications, Measurements, and Bibliography for Astronomical Data
set of identifications,measurements and bibliography for astronomical data
set of imprimitivity
set of infinite type
set of information
set of integers
set of less power
set of local coordinate cards
set of local frames
set of lower bounds
set of mappings
set of matrices
set of measure zero
set of multiples
set of multiplicity
set of natural numbers
set of non-uniqueness
set of nowhere dense
set of numbers
set of objectives
set of objects
set of observations
set of pairs
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