“micro electron-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	micro electron-mechanical system
释义	micro electron-mechanical system Encyclopedia 工学微机电系统释 micro electron-mechanical system；MEMS微机电系统尺寸在微米量级到亚微米量级，集微型机构、微型传感器、微型执行器以及信号处理和控制电路直至接口、通信和电源等于一体的微型器件或系统。全称微电子机械系统。
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