“micro electron-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	micro electron-mechanical system
释义	micro electron-mechanical system Encyclopedia 工学微机电系统释 micro electron-mechanical system；MEMS微机电系统尺寸在微米量级到亚微米量级，集微型机构、微型传感器、微型执行器以及信号处理和控制电路直至接口、通信和电源等于一体的微型器件或系统。全称微电子机械系统。
随便看	electromagnetic synthetic test instrument electromagnetic tensor electromagnetic test Electromagnetic Theory electromagnetic theory electromagnetic theory of light electromagnetic-thermo-mechanical constitutive relation of superconductors electromagnetic / ultrasonic integrated test instrument electromagnetic ultrasonic internal detector electromagnetic unit system electromagnetic valve electromagnetic variable electromagnetic vertial ring high gradient magnetic separator electromagnetic vibrating type seeder electromagnetic vibroseis electromagnetic viscosity electromagnetic voltage transformer electromagnetic wave electromagnetic wave absorbers electromagnetic wave absorbing materials electromagnetic wave diffraction electromagnetic wave height measurement electromagnetic wave in magnetosphere electromagnetic wave irradiation breeding electromagnetic wave logging device

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