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micro-electromechanical system sensor
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micro-electromechanical system sensor
Encyclopedia
工学
微电子机械系统
释
micro-electromechanical system sensor
微电子机械系统传感器
采用微纳加工工艺,基于微电子机械系统(micro-electromechanical system; MEMS)制造的新型传感器。
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Friedrich
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