“micro-electromechanical system optical filter”的概念、定义、翻译、参考文献-科学参考

单词	micro-electromechanical system optical filter
释义	micro-electromechanical system optical filter Encyclopedia 工学微电子机械系统光传感器释 micro-electromechanical system optical filter微电子机械系统光滤波器采用微机械结构和微纳制备工艺实现的用来进行光波长选择的器件。又称微电子机械系统滤镜。
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