“micro-electromechanical system microphone”的概念、定义、翻译、参考文献-科学参考

单词	micro-electromechanical system microphone
释义	micro-electromechanical system microphone Encyclopedia 工学微麦克风释 micro-electromechanical system microphone微麦克风采用微电子机械系统（micro-electromechanical system; MEMS）处理技术将压敏振膜直接蚀刻到硅晶片中，通常集成了前置放大器的能量转换器件。又称MEMS麦克风，简称硅麦。
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