“micro-electromechanical system biochemical sensor”的概念、定义、翻译、参考文献-科学参考

单词	micro-electromechanical system biochemical sensor
释义	micro-electromechanical system biochemical sensor Encyclopedia 工学微电子机械系统释 micro-electromechanical system biochemical sensor微电子机械系统生物化学传感器基于微电子机械系统（micro-electromechanical system; MEMS），能感应（或响应）生物、化学量，并按一定规律将其转换成可用信号（如电信号）输出的器件或装置。
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