“micro-electromechanical system actuator”的概念、定义、翻译、参考文献-科学参考

单词	micro-electromechanical system actuator
释义	micro-electromechanical system actuator Encyclopedia 工学微电子机械系统释 micro-electromechanical system actuator微电子机械系统执行器可以为微电子机械系统（micro-electromechanical system; MEMS）提供动力，也可以成为MEMS的操作和执行单元的部分。是MEMS的核心部分。
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