“micro-electromechanical system actuator”的概念、定义、翻译、参考文献-科学参考

单词	micro-electromechanical system actuator
释义	micro-electromechanical system actuator Encyclopedia 工学微电子机械系统释 micro-electromechanical system actuator微电子机械系统执行器可以为微电子机械系统（micro-electromechanical system; MEMS）提供动力，也可以成为MEMS的操作和执行单元的部分。是MEMS的核心部分。
随便看	heterodyne optical interferometer heterodyne oscillator heterodyne receiver heterodyne spectrometer heterodyning heteroecious parasitism heteroepitaxy heterogamete heterogamy heterogeneity heterogeneity of buds heterogeneous heterogeneous agent heterogeneous algebra heterogeneous aquifer heterogeneous architecture heterogeneous backup of electronic records heterogeneous body heterogeneous catalysis heterogeneous catalyst heterogeneous chemical reaction heterogeneous cluster heterogeneous compilation heterogeneous composite ceramics heterogeneous computing

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