“micro-electromechanical system actuator”的概念、定义、翻译、参考文献-科学参考

单词	micro-electromechanical system actuator
释义	micro-electromechanical system actuator Encyclopedia 工学微电子机械系统释 micro-electromechanical system actuator微电子机械系统执行器可以为微电子机械系统（micro-electromechanical system; MEMS）提供动力，也可以成为MEMS的操作和执行单元的部分。是MEMS的核心部分。
随便看	pointing pointing accuracy pointing calibration pointing control system pointing correction pointing device point in general position pointing error pointing jitter pointing mirror pointing technique pointintercept method point interval point-in-time consistency point-in-time copy point involution [point] lattice point lattice pointless topology point light source point-like point -like particle point-like particle point[-like] particle point like pinning

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