“micro-electromechanical system”的概念、定义、翻译、参考文献-科学参考

单词	micro-electromechanical system
释义	micro-electromechanical system Encyclopedia 工学封装技术释 micro-electromechanical system;MEMS微电子机械系统借助半导体制造技术加工微米尺度的微传感器、微执行器等器件，与集成电路相结合，形成信号处理与控制、机电、机械、传感集成一体化的智能系统。 Physics 凝聚态物理学特殊物相与极端条件 micro-electromechanical system, MEMS微电子机械系统
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