“micro-electro-mechanical system”的概念、定义、翻译、参考文献-科学参考

单词	micro-electro-mechanical system
释义	micro-electro-mechanical system Encyclopedia 理学〔半导体器件〕释 micro-electro-mechanical system; MEMS微电子机械系统集成了微机构、微传感器、微执行器及信号处理控制等功能于一体的系统。
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