“metalorganic vapor phase epitaxy”的概念、定义、翻译、参考文献-科学参考

单词	metalorganic vapor phase epitaxy
释义	metalorganic vapor phase epitaxy Encyclopedia 工学半导体外延生长释 metalorganic vapor phase epitaxy金属有机化合物气相外延 Ⅲ族金属有机物与Ⅴ族氢化物或烷基化合物用氢气载流，在加热的单温区进行分解并在衬底上沉积的技术。简称MOVPE。又称金属有机化学气相沉积。
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