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metalorganic vapor phase epitaxy
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metalorganic vapor phase epitaxy
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工学
半导体外延生长
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metalorganic vapor phase epitaxy
金属有机化合物气相外延
Ⅲ族金属有机物与Ⅴ族氢化物或烷基化合物用氢气载流,在加热的单温区进行分解并在衬底上沉积的技术。简称MOVPE。又称金属有机化学气相沉积。
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