“MEMS process simulation”的概念、定义、翻译、参考文献-科学参考

单词	MEMS process simulation
释义	MEMS process simulation Encyclopedia 工学微机电系统分层级设计释 MEMS process simulation微机电工艺仿真能够在三维沉浸感的虚拟环境中真实再现一个具体的工艺过程，并且允许用户实时操作工艺设备或改变相关参数的仿真技术。
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