“MEMS accelerometer”的概念、定义、翻译、参考文献-科学参考

单词	MEMS accelerometer
释义	MEMS accelerometer Encyclopedia 工学微机电加速度计释 MEMS accelerometer微机电加速度计一种采用半导体批生产工艺加工微结构，并集成相关信号处理电路的微惯性器件。
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