“magnetron sputtering equipment”的概念、定义、翻译、参考文献-科学参考

单词	magnetron sputtering equipment
释义	magnetron sputtering equipment Encyclopedia 工学物理气相沉积技术释 magnetron sputtering equipment磁控溅射镀膜装置在真空室中利用磁控溅射技术在基片（工件）表面形成薄膜的镀膜装置，主要由真空室、真空（排气）系统、充气系统、磁控溅射源系统和控制系统组成。
随便看	zero mapping zero material dispersion zero matrix zero mean zero-mean normalization zero measure zero meridian zero method zero-minimality zero-minimal two-sided ideal zero mode zero module zero morphism zero multiplication zero net growth isocline zero-neutrino double β decay zero neutron-absorption cross-section zero object zero object of a category zero of a differential zero of a division ring zero of a field zero of a function zero of a lattice zero of an Abelian group

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