“magnetron sputtering equipment”的概念、定义、翻译、参考文献-科学参考

单词	magnetron sputtering equipment
释义	magnetron sputtering equipment Encyclopedia 工学物理气相沉积技术释 magnetron sputtering equipment磁控溅射镀膜装置在真空室中利用磁控溅射技术在基片（工件）表面形成薄膜的镀膜装置，主要由真空室、真空（排气）系统、充气系统、磁控溅射源系统和控制系统组成。
随便看	active element active element of plant active elliptical galaxy active emergency culture active energy active escorted-jamming active fault active fault classification active fibre active field active filament system active fill-in luminous sign active filter active filtering active flight active flow control active-flux welding active fold active force active forgetting active frequency stablization technology active fuel battery active galactic nucleus active galactic nucleus classification active galactic nucleus polarization

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