“magnetron sputtering equipment”的概念、定义、翻译、参考文献-科学参考

单词	magnetron sputtering equipment
释义	magnetron sputtering equipment Encyclopedia 工学物理气相沉积技术释 magnetron sputtering equipment磁控溅射镀膜装置在真空室中利用磁控溅射技术在基片（工件）表面形成薄膜的镀膜装置，主要由真空室、真空（排气）系统、充气系统、磁控溅射源系统和控制系统组成。
随便看	pyrolysis experiment pyrolysis gas pyrolysis gas chromatography pyrolysis gas chromatography logging pyrolysis gas chromatography (PGC) pyrolysis gas oil pyrolysis gasoline pyrolysis mass spectrometry pyrolysis of polymers pyrolysis reactor pyrolysis recycle pyrolysis, thermolysis pyrolysis treatment of solid waste pyrolytically coated graphite tube pyrolytic carbon film resistor pyrolytic chemical vapor deposition pyrolytic elimination pyromagnetic pyromagnetic effect pyromagnetism pyromania Pyromax pyromelane pyromellitic dianhydride pyromellitic dianhydride; 1,2,4,5-benzenetetracarboxylic anhydride

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