“magnetron sputtering equipment”的概念、定义、翻译、参考文献-科学参考

单词	magnetron sputtering equipment
释义	magnetron sputtering equipment Encyclopedia 工学物理气相沉积技术释 magnetron sputtering equipment磁控溅射镀膜装置在真空室中利用磁控溅射技术在基片（工件）表面形成薄膜的镀膜装置，主要由真空室、真空（排气）系统、充气系统、磁控溅射源系统和控制系统组成。
随便看	aircraft electrical system aircraft electric propulsionunit aircraft electromagnetic compatibility/electromagentic environmental effects test aircraft electromagnetic compatibility test aircraft electromagnetic emission and susceptibility tests of equipments and subsystems aircraft electromagnetic pulse test aircraft electromechanical management system test aircraft electromechanical system ground test aircraft electro-Static discharge test aircraft empennage aircraft empty weight aircraft endurance performance aircraft engine aircraft engine inspection aircraft engine manufacturing technology aircraft environmental control system aircraft environmental control system test aircraft environmental protection system test aircraft environmental test aircraft escape system test aircraft evaluation aircraft experimental aerodynamics aircraft failure condition aircraft fairing structure aircraft final assembly

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