“magnetron sputtering equipment”的概念、定义、翻译、参考文献-科学参考

单词	magnetron sputtering equipment
释义	magnetron sputtering equipment Encyclopedia 工学物理气相沉积技术释 magnetron sputtering equipment磁控溅射镀膜装置在真空室中利用磁控溅射技术在基片（工件）表面形成薄膜的镀膜装置，主要由真空室、真空（排气）系统、充气系统、磁控溅射源系统和控制系统组成。
随便看	Spencer 15-point moving average Spencer cohomology Spencer formula Spencer Gulf Spencer Jones crater spent spent batteries spent fuel spent fuel cutting spent fuel decladding spent fuel dissolution spent fuel pool spent fuel reprocessing spent fuel reprocessing plant spent fuel shearing spent fuel storage spent fuel storage pool spent mushroom compost spent [nuclear] fuel reprocessing spent nuclear fuel reprocessing sperm spermaceti wax spermaduct spermagglutinin spermagonium

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