“magnetron sputtering equipment”的概念、定义、翻译、参考文献-科学参考

单词	magnetron sputtering equipment
释义	magnetron sputtering equipment Encyclopedia 工学物理气相沉积技术释 magnetron sputtering equipment磁控溅射镀膜装置在真空室中利用磁控溅射技术在基片（工件）表面形成薄膜的镀膜装置，主要由真空室、真空（排气）系统、充气系统、磁控溅射源系统和控制系统组成。
随便看	sigma-compact space sigma-complete sigma-complete ideal sigma-complete lattice sigma-completeness sigma complete vector lattice sigma complex sigma discrete family sigma-discrete family sigma electron sigma field sigma-field sigma field of events sigma-field of events sigma-field of sets sigma field prior to tau sigma-field prior to tau sigma-field prior to τ sigma-field strictly prior to τ sigma-finite sigma finite measure sigma-finite measure sigma-finite measure space sigma formyl complex sigma-formyl complex

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