“magnetron sputtering equipment”的概念、定义、翻译、参考文献-科学参考

单词	magnetron sputtering equipment
释义	magnetron sputtering equipment Encyclopedia 工学物理气相沉积技术释 magnetron sputtering equipment磁控溅射镀膜装置在真空室中利用磁控溅射技术在基片（工件）表面形成薄膜的镀膜装置，主要由真空室、真空（排气）系统、充气系统、磁控溅射源系统和控制系统组成。
随便看	autoregressive conditional heteroscedasticity model autoregressive conditional heteroscedastic model autoregressive conditional heteroskedasticity process autoregressive conditional heteroskedasticity process; ARCH process auto-regressive distributed lag model autoregressive equation autoregressive integrated moving-average autoregressive integrated moving average model autoregressive model autoregressive model; AR model autoregressive model spectrum estimation autoregressive moving autoregressive moving average autoregressive-moving average autoregressive moving average, ARMA autoregressive moving average model autoregressive moving-average model autoregressive moving average model spectrum estimation autoregressive moving-average process autoregressive moving average with exogenous input autoregressive moving average with exogenous input (ARMAX) autoregressive process autoregressive process, AR process autoregressive source autoregressive spectral estimator

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