“magnetron sputtering equipment”的概念、定义、翻译、参考文献-科学参考

单词	magnetron sputtering equipment
释义	magnetron sputtering equipment Encyclopedia 工学物理气相沉积技术释 magnetron sputtering equipment磁控溅射镀膜装置在真空室中利用磁控溅射技术在基片（工件）表面形成薄膜的镀膜装置，主要由真空室、真空（排气）系统、充气系统、磁控溅射源系统和控制系统组成。
随便看	local moduli theory local monodromy local monodromy matrix local monodromy representation local most powerful detector local moving frame local multiplicity of the intersection local multipoint distribution services local multipoint distribution services, LMDS local navigation local neighborhood local nilpotent ideal local non-inferior solution local noon local normality local object local office local one-parameter group local operating network bus local operation local operation and classical communication local operation and classical communication, LOCC local operations local operations and classical communication local operations and classical communication (LOCC)

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