“magnetron sputtering equipment”的概念、定义、翻译、参考文献-科学参考

单词	magnetron sputtering equipment
释义	magnetron sputtering equipment Encyclopedia 工学物理气相沉积技术释 magnetron sputtering equipment磁控溅射镀膜装置在真空室中利用磁控溅射技术在基片（工件）表面形成薄膜的镀膜装置，主要由真空室、真空（排气）系统、充气系统、磁控溅射源系统和控制系统组成。
随便看	critically damped critical magnetic field critical magnetic field of equilibrium phase transition critical magnetic field of small specimens critical manifold critical mass critical mass of nuclear fission critical mass-ratio critical mass-to-light ratio critical matching critical meteorological conditions of hazard critical metric critical micelle concentration critical micelle concentration (CMC) critical micelle concentration, CMC critical micelle concentration (cmc; CMC) critical/minimum transport velocity critical model critical moisture critical molecular clusters critical molecular weight critical nucleus size critical oil film thickness critical ontology critical opalescence

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