“lithography illumination system”的概念、定义、翻译、参考文献-科学参考

单词	lithography illumination system
释义	lithography illumination system Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	time-temperaturetransformation diagram time-temperature transformation diagram,3T diagram time tick time to amplitude convertor time to digital converter time-to-failure measure time to first fix time-to-go time to live time to peak concentration time transfer time transfer GNSS receiver time transformation time translation time translation invariance time translation operator time trend time-triggered ethernet time-triggered mechanism time-unvaried channel time value of money time variable time variance time variant circuit time variant data

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