“lithography illumination system”的概念、定义、翻译、参考文献-科学参考

单词	lithography illumination system
释义	lithography illumination system Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	correlation analysis of big data correlation analysis tool Correlation Between Language and Music: Collected Papers on Modern Chinese Drama correlation calculus correlation coefficient correlation color temperature correlation control unit correlation dependence correlation detection correlation detector correlation determinant correlation diagram correlation diagram of energy level correlation dimension correlation energy correlation evaluation correlation exponent correlation flowmeter correlation fluctuation of pressure and entropy correlation fluctuation of pressure and volume correlation fluctuation of temperature and entropy correlation fluctuation of temperature and volume correlation function correlation functional correlation function method

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