“lithography illumination system”的概念、定义、翻译、参考文献-科学参考

单词	lithography illumination system
释义	lithography illumination system Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	cavitation surge cavitation theory cavitation threshold Cavite Revolt caviton cavity cavity clocking cavity coupling cavity dark state cavity dumped laser cavity-dumped laser [cavity] dumper cavity dumper cavity dumping cavity electrochemical machining tool cavity flow model cavity interventional radiology cavityless cavity mode cavity of diaphragm compressor cavity optomechanics cavity oscillation cavity polariton cavity pulling cavity quantum electrodynamics

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。