“lithography illumination system”的概念、定义、翻译、参考文献-科学参考

单词	lithography illumination system
释义	lithography illumination system Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	Kant-Laplace nebular theory Kant-Laplace theory Kantora kingdom Kantorovich Kantorovich inequality Kantorovich method Kantorovich process Kantorovich Rubinstein Wasserstein distance Kantorovich-Rubinstein-Wasserstein distance Kantorovich space Kantowski-Sachs solution Kant theory kantuman Kanuri Kanwanakokuō Golden Seal kanxiang publication censorship Kanyama Chiume Kan Yin Kanō Eitoku Kanō Motonobu Kanō school Kan’emon Nakamura KAO Kao, Charles Kuen Kao Club

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