“lithography illumination system”的概念、定义、翻译、参考文献-科学参考

单词	lithography illumination system
释义	lithography illumination system Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	dolbyized Dolby stereo Dolby Vision Dolce & Gabbana Dolcino Insurrection doldrums dole effect dolichocentrus dolichol oligosaccharide precursor Dolisie dollar dollar diplomacy dollar paradox dollar spot Dollfus polarimeter dolly Dolmen Dolmen at Ximucheng Dolmen in southern Zhejiang Dolmens at Shipenggou Dolmens at Shipengshan Dolmens in Liaodong Peninsula dolomite dolomitite dolomitization

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