“lithography illumination system”的概念、定义、翻译、参考文献-科学参考

单词	lithography illumination system
释义	lithography illumination system Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	molcohesion mold mold and cast Moldavian language Moldavian Literature Moldavians moldavite moldboard plough mold casting process mold core mold culture molded panel molded tablets mold expansion molding molding by stamping molding charcoal molding equipment molding machine molding material molding of plastics foam molding process molding sand molding sand binder molding surface

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