“lithography illumination system”的概念、定义、翻译、参考文献-科学参考

单词	lithography illumination system
释义	lithography illumination system Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	capister capital capital accumulation capital asset pricing model capital breeder capital budget capital budgeting Capital Camps capital circulation Capital Cities and Tombs of the Ancient Koguryo Kingdom World Culture Heritage capital cities from Song to Qing Dynasties capital city Capital City of Biyang State Capital City of Cai State Capital City of Deng State Capital City of Mou State Capital City of Teng State Capital City of Wei State Capital City of Yan State Capital City of Zhu State capital company capital construction of open pit capital construction plan of Xinjing during the puppet Manchoukuo period capital construction plan of xinjing during the puppet manchoukuo period，1932～1938 capital contribution

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。