“lithography illumination system”的概念、定义、翻译、参考文献-科学参考

单词	lithography illumination system
释义	lithography illumination system Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	single molecular PCR，SM-PCR single molecular transistor single molecule analysis single-molecule counting single molecule detection single-molecule detection single molecule detection (SMD) single-molecule dynamic force spectroscopy single molecule electrochemistry single molecule fluorescence single-molecule fluorescence fluctuation spectroscopy single-molecule fluorescence imaging single molecule fluorescence microscope single molecule fluorescence resonance energy transfer single molecule fluorescence resonance energy transfer (smFRET) single molecule force spectroscopy single-molecule imaging single-molecule manipulation single molecule method for biomacromolecule characterization single molecule photobleaching step single-molecule rupture force single molecule sequencing single-molecule spectroscopy single molecule techniques single-molecule tracking

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