“lithography illumination system”的概念、定义、翻译、参考文献-科学参考

单词	lithography illumination system
释义	lithography illumination system Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	negative molecule negative multinomial distribution negative nitrogen balance negative norm negative number negative octant negative orientation negative orthant negative parallax negative part negative particular proposition negative part of a function negative part of an element negative peak negative pedal curve negative perfect correlation negative permeability materials negative permittivity materials negative phototropism negative plate negative platemaking negative Poisson's ratio material negative polarity items negative polarity machining negative polynomial distribution

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