“lithography illumination system”的概念、定义、翻译、参考文献-科学参考

单词	lithography illumination system
释义	lithography illumination system Encyclopedia 工学光刻机照明系统释 lithography illumination system光刻机照明系统为投影物镜成像提供特定光线角谱和强度分布的照明光场。它是复杂的非成像光学系统，介于曝光光源和投影物镜之间。
随便看	CAD computer-aided process plant design CAD computer-aided steelwork design CADD cadence of dance Cadenus and Vanessa cadenza Cade’s Rebellion cadherin cadinane CADIST CADLA cadlag cadlag function CAD mapping mode for digital map cadmium cadmium arsenide cadmium cell Cadmium-contaminated rice cadmium contamination of croplands cadmium halide cadmium hydroxide cadmium isotope hydrogeology cadmium metallurgy cadmium on neutron cadmium ore resources

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