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LIGA technology
释义
LIGA technology
Encyclopedia
工学
[传感器制造]
释
LIGA technology
LIGA技术
一种制备传感器的工艺技术。特别适合微机电系统(MEMS)传感器功能结构器件的加工。
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cogredient automorphism
cogredient substitution
cogroup
cogroup object
COH
cohabitation
coheight
Cohen
Cohen-Macaulay module
Cohen Macaulay ring
Cohen-Macaulay ring
Cohen-Macaulay scheme
Cohen-Macaulay variety
Cohen,Paul Joseph
Cohen ring
Cohen rule
Cohen-Tannoudji, Claude
Cohen theorem
cohereditary subcategory
coherence
coherence area
coherence bandwidth
coherence condition
coherence cube
coherence distance
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