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LIGA technology
释义
LIGA technology
Encyclopedia
工学
[传感器制造]
释
LIGA technology
LIGA技术
一种制备传感器的工艺技术。特别适合微机电系统(MEMS)传感器功能结构器件的加工。
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heavy-ion accelerator
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heavy-ion beam driven fusion
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heavy ion collision in intermediate energy
heavy ion fusion evaporation reaction
heavy-ion fusion evaporation reaction
heavy ion fusion-fission
heavy ion fusion reaction
heavy ion induced desorption
heavy ion induced desorption (HIID)
heavy ion jet interaction generator
heavy-ion jet interaction generator
heavy ion linear accelerator
heavy ion nuclear chemistry
heavy ion radioactivity
heavy-ion radioactivity
heavy ion reaction
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