“laser parameter detection”的概念、定义、翻译、参考文献-科学参考

单词	laser parameter detection
释义	laser parameter detection Encyclopedia 工学光刻光源释 laser parameter detection激光参数检测在光刻光源投入使用前，对光刻激光性能参数进行准确检测评估，并在使用过程中实时监测控制。与光刻系统成本、光刻质量、成品率、效率和设备利用率等密切相关。
随便看	cyclotomic function cyclotomic graph cyclotomic integer cyclotomic invariant cyclotomic number cyclotomic polynomial cyclotomic units cyclotomic Zpextension cyclotomy cyclotron cyclotron absorption cyclotron damping cyclotron effective mass cyclotron emission cyclotron frequency cyclotron gyration of a charged particle cyclotron harmonic wave cyclotron instability cyclotron maser cyclotron radiation cyclotron radiation and synchrotron radiation cyclotron radius cyclotron resonance cyclotron resonance frequency cyclotron-resonance heating

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