“ion beam sputtering deposition system”的概念、定义、翻译、参考文献-科学参考

单词	ion beam sputtering deposition system
释义	ion beam sputtering deposition system Encyclopedia 工学物理气相沉积技术释 ion beam sputtering deposition system离子束溅射镀膜装置通过离子束轰击固体靶材，使溅射的粒子沉积于基材（工件）形成固体薄膜的一种真空镀膜装置，主要由真空系统、离子源、溅射靶材、控制系统等几部分组成。
随便看	stochastic automaton stochastic averaging method stochastic basis stochastic bias stochastic bifurcation stochastic boundedness stochastic Burgers equation stochastic calculus stochastic calculus of variations stochastic connection stochastic contact theory stochastic continuity stochastic control stochastic controllability stochastic control system stochastic control systems stochastic control theory stochastic convergence stochastic decision process stochastic decision theory stochastic delay equation stochastic demand stochastic dependence stochastic description stochastic difference equation

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