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ion beam mixing
释义
ion beam mixing
Encyclopedia
工学
[粒子束流与固体相互作用]
释
ion beam mixing
离子束混合
将离子束与薄膜技术相结合,使用离子束(通常是惰性气体离子)在沉积的膜层与基底之间,或者是在膜层与膜层之间通过原子间的碰撞相互混合,从而形成均匀成份的合金相。
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