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immersion lithography technology
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immersion lithography technology
Encyclopedia
工学
光刻技术
释
immersion lithography technology
浸入式光刻技术
集成电路制造中,利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF(193纳米)浸入式光刻技术。
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