“immersion lithography technology”的概念、定义、翻译、参考文献-科学参考

单词	immersion lithography technology
释义	immersion lithography technology Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	Lie-Bäcklund transformation Liechtenstein Liechtensteiners Liechtenstein National Museum Liechtenstein Postal Museum Lie commutator Lie contact transformation LIED Lie derivative lie detect lie detection by speech lie detector lie detector question permutation Lie differential Lie differentiation Li Eding lied ohne worte Lie equation Lie Fu Lie fundamental theorem Lie geometry Lie group Lie group adjoint representation Lie groupoid Lie group quotient space

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。