“immersion lithography technology”的概念、定义、翻译、参考文献-科学参考

单词	immersion lithography technology
释义	immersion lithography technology Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	Record Book of Imperial Edicts of Xianfeng and Tongzhi Record Book of Missionary Cases of Qing Dynasty record date record drawings Recorde Recorded broadcasting Recorded Sayings of Past Worthies Recorded Sayings of the Perfected Bai from Qiongzhou recorder recorder/assistant magistrate Record for Getting Through Summer in the Riverine Village Record for Getting Through the Summer of the Gengzi Year Record from the Jiangbiao Area record groove Recording Angel Recording Art Major, School of Film and Television, Communication University of China, Nanjing recording assistant recording-broadcasting system recording density recording Doppler comparator recording electrode recording engineer recording equipment recording flowers in Luoyang recording instrument

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