“immersion lithography technology”的概念、定义、翻译、参考文献-科学参考

单词	immersion lithography technology
释义	immersion lithography technology Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	microbial metabolite insecticides microbial metabolome microbial metagenome microbial metallurgy microbial metaproteome microbial metatranscriptome microbial microevolution microbial nitrogen assimilation microbial nitrogen transformation microbial nutrient elements microbial nutrition microbial organic fertilizer microbial pesticide microbial pharmacy microbial phosphorus transformation microbial physiological ecology microbial physiology microbial plastics microbial preservation microbial radiation mutation breeding microbial reaction microbial reduction microbial reference material microbial remediation microbial resources

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