“immersion lithography technology”的概念、定义、翻译、参考文献-科学参考

单词	immersion lithography technology
释义	immersion lithography technology Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	electromagnetic environment of DC transmission engineering electromagnetic environment of electric traction system electromagnetic environment of power facilities electromagnetic environment of radio and television transmitting stations electromagnetic equation electromagnetic equilibrium electromagnetic extraction electromagnetic field Electromagnetic field invariant electromagnetic field of moving charged particle electromagnetic field tensor electromagnetic flowmeter /magnetic inductance flowmeter electromagnetic focusing electromagnetic force electromagnetic form factor electromagnetic forming electromagnetic gauge invariance electromagnetic gradient receiver electromagnetic gun electromagnetic high-gradient magnetic filter electromagnetic horizontal ring high-intensity magnetic separator electromagnetic-hydro-mechanical coupling electromagnetic immunity electromagnetic induced roller high-intensity magnetic separator electromagnetic induction

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