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immersion lithography technology
释义
immersion lithography technology
Encyclopedia
工学
光刻技术
释
immersion lithography technology
浸入式光刻技术
集成电路制造中,利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF(193纳米)浸入式光刻技术。
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single layer
single layer graphene
single-layer graphene
single-layer neural network
single-layer potential
single lens electronic view finder
single lens machine back viewfinder
single lens reflex camera
single lens reflex digital camera
single lens reflex finder
single-lens translucent digital camera
single lens viewfinder
single level
single level cell
single-level cell
single level cell, SLC
single-level standardization problem
single line
single-lined binary
single line diagram for hydropower station
single-lined spectroscopic binary
single-line operation
single line propagation
single linkage
single linked list
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