“immersion lithography technology”的概念、定义、翻译、参考文献-科学参考

单词	immersion lithography technology
释义	immersion lithography technology Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	Shifosi Shuiku shift shift and invert shift-and-invert shift angle shift automorphism shift decision shift dynamical system shifted factorial shifted inverse iteration shifted QR method shifted Weyl reflection shifter shift factor shift-in shift-induced interference shifting shifting balance theory shifting bottleneck procedure shifting cultivation shifting dunes control at Ningxia Shapotou Section of the Baotou-Lanzhou Railway Shifting (Funds) shifting method shifting operator shifting sand

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