“immersion lithography technology”的概念、定义、翻译、参考文献-科学参考

单词	immersion lithography technology
释义	immersion lithography technology Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	finite element method (FEM) finite element method, FEM finite element method for incremental theory of plasticity finite element method for structures finite element method for total theory of plasticity finite element method of electromagnetic field finite element method，FEM finite element model finite-element network finite element numerical simulation finite element tearing and interconnecting finite element tearing and interconnecting, FETI finite element time domain method finite equation finite escape time finite extension finite extension field finite factor finite family finite family of sets finite field finite-field extension finite Fourier transform finite fraction finite function

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