“immersion lithography technology”的概念、定义、翻译、参考文献-科学参考

单词	immersion lithography technology
释义	immersion lithography technology Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	background electrolyte background electrolyte (BGE) background elimination background extinction background extinction rate background field background fluctuation background fog background galaxy background galaxy cluster background glow backgrounding background intensity background investigation background limited detectivity background mass spectrum background mathematics background mode background monitoring background music background noise background-noise level background optical and electromagnetic characteristic background projection process background radiation

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