“immersion lithography technology”的概念、定义、翻译、参考文献-科学参考

单词	immersion lithography technology
释义	immersion lithography technology Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	calibrated manifold calibrated submanifold calibrating receiver calibrating source calibration calibration accuracy Calibration and Measurement Capability calibration battery calibration curve calibration curve method calibration device of force measuring instrument calibration device of temperature measuring instrument calibration field calibration form calibration for radio observation calibration gas calibration gas generating system calibration in the radiative calibration site calibration method of radioactivity instruments calibration method with auxiliary sound source calibration method with three reciprocity microphones calibration model transfer calibration of airborne radioactivity system calibration of focal plane position of collimator calibration of neutron measurement instruments

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