“immersion lithography technology”的概念、定义、翻译、参考文献-科学参考

单词	immersion lithography technology
释义	immersion lithography technology Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	logarithmic distribution logarithmic ellipse logarithmic equation logarithmic function logarithmic functions of a complex variable logarithmic height logarithmic hyperbola logarithmic inequality logarithmic integral logarithmic integral function logarithmic kernel logarithmic likelihood function logarithmic mapping logarithmic mass potential logarithmic mean Logarithmic Mean Divisia Index Method，LMDI logarithmic method logarithmic multiplier logarithmic norm logarithmic normal distribution logarithmic number logarithmic paper logarithmic parabola logarithmic part logarithmic period

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