“immersion lithography technology”的概念、定义、翻译、参考文献-科学参考

单词	immersion lithography technology
释义	immersion lithography technology Encyclopedia 工学光刻技术释 immersion lithography technology浸入式光刻技术集成电路制造中，利用光通过液体介质后光源波长缩短来提高分辨力的光刻技术。一般指ArF（193纳米）浸入式光刻技术。
随便看	correspondence theory of truth correspondence to a subordinate agency correspondency correspondent correspondent inference theory correspondent node correspondent registration corresponding corresponding angles corresponding auxiliary equation corresponding catenation corresponding continued fraction corresponding ideal corresponding image points correspondingly corresponding matrix corresponding points corresponding polynomial corresponding segments corresponding series corresponding sides corresponding state corresponding terms corresponding vertices corresponsive

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