“hydride vapor phase epitaxy equipment”的概念、定义、翻译、参考文献-科学参考

单词	hydride vapor phase epitaxy equipment
释义	hydride vapor phase epitaxy equipment Encyclopedia 工学半导体照明装备释 hydride vapor phase epitaxy equipment氢化物气相外延设备在外延生长所需的化学组分中，至少采用一种氢化物的气相外延设备。
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