“hot filament chemical vapor deposition”的概念、定义、翻译、参考文献-科学参考

单词	hot filament chemical vapor deposition
释义	hot filament chemical vapor deposition Encyclopedia 工学化学气相沉积释 hot filament chemical vapor deposition热丝化学气相沉积采用高温热丝分解前驱气体，通过调节前驱体组分对比和热丝温度而获得大面积的高质量沉积膜的方法。
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科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。