“hot filament chemical vapor deposition”的概念、定义、翻译、参考文献-科学参考

单词	hot filament chemical vapor deposition
释义	hot filament chemical vapor deposition Encyclopedia 工学化学气相沉积释 hot filament chemical vapor deposition热丝化学气相沉积采用高温热丝分解前驱气体，通过调节前驱体组分对比和热丝温度而获得大面积的高质量沉积膜的方法。
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