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CMOS工艺
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high-K metal gate technology;HKMG
高K金属栅工艺
在互补金属-氧化物-半导体(complementary metal-oxide-semiconductor,CMOS)集成电路中,用高K栅介质与金属栅电极取代传统栅氧化层与多晶硅栅的工艺技术。
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