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glancing incidence
释义
glancing incidence
Encyclopedia
工学
光刻机测量系统
释
glancing incidence
掠入射调焦调平测量
以三角测量原理为基础的垂向测量方法,其通常采用双远心成像系统,并以较大的入射角在被测物表面成像。
Physics
光学、声学
光学
glancing incidence, grazing incidence
掠入射
glancing incidence
掠入射
†
,小角度入射
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