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focused ion beam technology
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focused ion beam technology
Encyclopedia
工学
〔纳米科学中核技术〕
释
focused ion beam technology; FIB
聚焦离子束技术
利用电透镜将离子束聚焦成微米尺寸的束斑轰击材料表面,实施显微切割和加工,进而实现材料的剥离、沉积、注入和改性的一种技术。
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