“focused ion beam lithography”的概念、定义、翻译、参考文献-科学参考

单词	focused ion beam lithography
释义	focused ion beam lithography Encyclopedia 工学磁致动器释 focused ion beam lithography聚焦离子束光刻在聚焦离子束技术基础上将原子离化后形成离子束的能量控制在10～200千电子伏特，在工件表面采用直接扫描、掩模曝光或者投影曝光加工微细线条图案，制备微纳器件的工艺。
随便看	geometric average geometric axiom geometric barycenter geometric body geometric boundary condition geometric braid group of order n geometric braid group of order n of space X geometric Brownian motion geometric burning rule geometric calculus geometric calibration geometric cell complex geometric centroid geometric chain complex geometric characteristic geometric characterization geometric class geometric closure system geometric code geometric complex geometric computing in 3D printing geometric computing on mesh surfaces geometric concentration　ratio geometric configuration geometric congruence

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