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extreme ultraviolet lithography technology
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extreme ultraviolet lithography technology
Encyclopedia
工学
光刻技术
释
extreme ultraviolet lithography technology
极紫外光刻技术
集成电路制造中,以波长为13.5纳米的极紫外光作为曝光光源的光刻技术。
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pressure coefficient at constant volume
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pressure control algorithm of pressure constant ensemble simulation
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