“electron beam physical vapor deposition”的概念、定义、翻译、参考文献-科学参考

单词	electron beam physical vapor deposition
释义	electron beam physical vapor deposition Encyclopedia 工学[薄膜材料]释 electron beam physical vapor deposition; EB-PVD电子束物理气相沉积以电子束作为热源的蒸镀方法。简称EB-PVD。
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