“dual frequency interference measurement”的概念、定义、翻译、参考文献-科学参考

单词	dual frequency interference measurement
释义	dual frequency interference measurement Encyclopedia 工学光刻机测量系统释 dual frequency interference measurement双频干涉位移测量利用双频氦氖激光器，以激光波长为基准，按多普勒频移和干涉原理产生干涉条纹进行几何量测量。
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